Brief: Entegris Inc: Entered Into Non-Exclusive Cross-Licensing To EUV Lithography With JSR Corp
27/05/2026 24:46
BRIEF-Entegris Inc: Entered Into Non-Exclusive Cross-Licensing To EUV Lithography With JSR Corp May 27 (Reuters) - Entegris Inc ENTG.O:
ENTEGRIS INC: UNDER THE AGREEMENT, ENTEGRIS AND JSR UNIT INPRIA TERMINATE CURRENT INTER PARTES REVIEW AND EXPLORE COLLABORATIVE OPPORTUNITIES ON FUTURE PHOTORESIST MATERIALS
ENTEGRIS INC: ENTERED INTO NON-EXCLUSIVE CROSS-LICENSING TO EUV LITHOGRAPHY WITH JSR CORP
Further company coverage: ENTG.O
(Reporting by Kantaro Komiya)
((Kantaro.Komiya@thomsonreuters.com;))
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Brief: Entegris Inc: Entered Into Non-Exclusive Cross-Licensing To EUV Lithography With JSR Corp